Simulation of Chemical Vapor Deposition Processes

Research output: Chapter in Book/Conference proceedings/Edited volume › Chapter › Scientific

Original language	Undefined/Unknown
Title of host publication	Methods in Materials Research: A Current Protocols Publication
Editors	EN Kaufmann
Place of Publication	New York
Publisher	John Wiley & Sons
Pages	2a.7.1-2a.7.15
Number of pages	15
Publication status	Published - 2001

Keywords

@inbook{76cb057a9afc4853b5f65e32fd50fe6b,

title = "Simulation of Chemical Vapor Deposition Processes",

keywords = "Boekdeel internat.wet",

author = "CR Kleijn",

year = "2001",

language = "Undefined/Unknown",

pages = "2a.7.1--2a.7.15",

editor = "EN Kaufmann",

booktitle = "Methods in Materials Research: A Current Protocols Publication",

publisher = "John Wiley \& Sons",

address = "United States",

}