Single atom doping for quantum device development in diamond and silicon

CD Weis, A Schuh, A Batra, A Persaud, IW Rangelow, J Bokor, CC Lo, S Cabrini, E Sideras-Haddad, GD Fuchs, R Hanson, D.D. Awschalom, T Schenkel

    Research output: Contribution to journalArticleScientificpeer-review

    44 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)2596-2600
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Issue number6
    Publication statusPublished - 2008


    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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