Single atom doping for quantum device development in diamond and silicon

CD Weis; A Schuh; A Batra; A Persaud; IW Rangelow; J Bokor; CC Lo; S Cabrini; E Sideras-Haddad; GD Fuchs; R Hanson; D.D. Awschalom; T Schenkel

Single atom doping for quantum device development in diamond and silicon

CD Weis, A Schuh, A Batra, A Persaud, IW Rangelow, J Bokor, CC Lo, S Cabrini, E Sideras-Haddad, GD Fuchs, R Hanson, D.D. Awschalom, T Schenkel

Research output: Contribution to journal › Article › Scientific › peer-review

44 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	2596-2600
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	26
Issue number	6
Publication status	Published - 2008

Keywords

academic journal papers
CWTS 0.75 <= JFIS < 2.00

Cite this

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title = "Single atom doping for quantum device development in diamond and silicon",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "CD Weis and A Schuh and A Batra and A Persaud and IW Rangelow and J Bokor and CC Lo and S Cabrini and E Sideras-Haddad and GD Fuchs and R Hanson and D.D. Awschalom and T Schenkel",

year = "2008",

language = "Undefined/Unknown",

volume = "26",

pages = "2596--2600",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Single atom doping for quantum device development in diamond and silicon

AU - Weis, CD

AU - Schuh, A

AU - Batra, A

AU - Persaud, A

AU - Rangelow, IW

AU - Bokor, J

AU - Lo, CC

AU - Cabrini, S

AU - Sideras-Haddad, E

AU - Fuchs, GD

AU - Hanson, R

AU - Awschalom, D.D.

AU - Schenkel, T

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 26

SP - 2596

EP - 2600

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -