Single-crystalline Si thin film transistors with electron cyclotron resonance plasma enhanced chemical vapor deposited gate SiO2

R Ishihara, BD van Dijk, PC van der Wilt, JW Metselaar, CIM Beenakker, Y Hiroshima, D Abe, S Higashi, S Inoue, T Shimoda

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEURODISPLAY 2002 proceedings
Place of Publications.l.
Publishers.n.
Pages407-409
Number of pages3
ISBN (Print)2-9507804-3-1
Publication statusPublished - 2002
EventEURODIPLAY 2002, Nice, France - s.l.
Duration: 2 Oct 20024 Oct 2002

Publication series

Name
Publishers.n.

Conference

ConferenceEURODIPLAY 2002, Nice, France
Period2/10/024/10/02

Keywords

  • Elektrotechniek
  • Techniek
  • Geen BTA classificatie

Cite this