Single-grain Si TFTs fabricated by liquid-Si and long-pulse excimer-laser

R Ishihara, J Zhang, M Trifunovic, M van der Zwan, H Takagishi, R Kawajiri, T Shimoda, CIM Beenakker

Research output: Contribution to journal › Conference article › Scientific › peer-review

Keywords

@article{a1bcffbdfef34c9ca2fc3737862505bb,

title = "Single-grain Si TFTs fabricated by liquid-Si and long-pulse excimer-laser",

keywords = "CWTS JFIS < 0.75",

author = "R Ishihara and J Zhang and M Trifunovic and {van der Zwan}, M and H Takagishi and R Kawajiri and T Shimoda and CIM Beenakker",

year = "2012",

language = "English",

volume = "50",

pages = "48--53",

journal = "ECS Transactions",

issn = "1938-5862",

publisher = "Electrochemical Society, Inc.",

number = "8",

}

TY - JOUR

T1 - Single-grain Si TFTs fabricated by liquid-Si and long-pulse excimer-laser

AU - Ishihara, R

AU - Zhang, J

AU - Trifunovic, M

AU - van der Zwan, M

AU - Takagishi, H

AU - Kawajiri, R

AU - Shimoda, T

AU - Beenakker, CIM

PY - 2012

Y1 - 2012

KW - CWTS JFIS < 0.75

M3 - Conference article

SN - 1938-5862

VL - 50

SP - 48

EP - 53

JO - ECS Transactions

JF - ECS Transactions

IS - 8

ER -