Single-grain Si TFTs using spin-coated liquid-silicon

J Zhang; R Ishihara; H Tagagishi; R Kawajiri; T Shimoda; CIM Beenakker

doi:10.1109/IEDM.2011.6131553

Single-grain Si TFTs using spin-coated liquid-silicon

J Zhang, R Ishihara, H Tagagishi, R Kawajiri, T Shimoda, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

6 Citations (Scopus)

Original language	English
Title of host publication	Technical Digest 2011 IEEE International Electron Device Meeting (IEDM 2011)
Editors	K Ishimaru, V Misra
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	1-4
Number of pages	4
ISBN (Print)	978-1-4577-0505-2
DOIs	https://doi.org/10.1109/IEDM.2011.6131553
Publication status	Published - 2011
Event	IEDM 2011 - Piscataway, NJ, USA Duration: 5 Dec 2011 → 7 Dec 2011

Publication series

Name
Publisher	IEEE

Conference

Conference	IEDM 2011
Period	5/12/11 → 7/12/11

Keywords

conference contrib. refereed
Conf.proc. > 3 pag

Access to Document

10.1109/IEDM.2011.6131553

Cite this

@inproceedings{83a7d310e3374d778f5500c5e6e368b3,

title = "Single-grain Si TFTs using spin-coated liquid-silicon",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "J Zhang and R Ishihara and H Tagagishi and R Kawajiri and T Shimoda and CIM Beenakker",

year = "2011",

doi = "10.1109/IEDM.2011.6131553",

language = "English",

isbn = "978-1-4577-0505-2",

publisher = "IEEE",

pages = "1--4",

editor = "K Ishimaru and V Misra",

booktitle = "Technical Digest 2011 IEEE International Electron Device Meeting (IEDM 2011)",

address = "United States",

note = "IEDM 2011 ; Conference date: 05-12-2011 Through 07-12-2011",

}

Single-grain Si TFTs using spin-coated liquid-silicon. / Zhang, J; Ishihara, R; Tagagishi, H et al.
Technical Digest 2011 IEEE International Electron Device Meeting (IEDM 2011). ed. / K Ishimaru; V Misra. Piscataway, NJ, USA: IEEE, 2011. p. 1-4.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Single-grain Si TFTs using spin-coated liquid-silicon

AU - Zhang, J

AU - Ishihara, R

AU - Tagagishi, H

AU - Kawajiri, R

AU - Shimoda, T

AU - Beenakker, CIM

PY - 2011

Y1 - 2011

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

U2 - 10.1109/IEDM.2011.6131553

DO - 10.1109/IEDM.2011.6131553

M3 - Conference contribution

SN - 978-1-4577-0505-2

SP - 1

EP - 4

BT - Technical Digest 2011 IEEE International Electron Device Meeting (IEDM 2011)

A2 - Ishimaru, K

A2 - Misra, V

PB - IEEE

CY - Piscataway, NJ, USA

T2 - IEDM 2011

Y2 - 5 December 2011 through 7 December 2011

ER -