Single-mask fabrication of temperature triggered MEMS switch for cooling control in SSL system

J Wei, H Ye, HW van Zeijl, PM Sarro, GQ Zhang

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProcedia Engineering - Proceedings 26th European Conference on Solid-State Transducers, EUROSENSOR 2012
EditorsR Walczak, J Dziuban
Place of PublicationAmsterdam, The Netherlands
PublisherElsevier
Pages849-852
Number of pages4
DOIs
Publication statusPublished - 2012
EventEurosensors XXVI, 9-12 September, 2012, Kraków, Poland - Amsterdam, The Netherlands
Duration: 9 Sep 201212 Sep 2012

Publication series

Name
PublisherElsevier
NameProcedia Engineering
Volume47
ISSN (Print)1877-7058

Conference

ConferenceEurosensors XXVI, 9-12 September, 2012, Kraków, Poland
Period9/09/1212/09/12

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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