Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

DW de Lima Monteiro, O Akhzar-Mehr, PM Sarro, GV Vdovin

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{a0ca7cc6bbb242e28ee0587d2c61e8e0,

title = "Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si",

keywords = "Elektrotechniek, Techniek, ZX CWTS 1.00 <= JFIS < 3.00",

author = "{de Lima Monteiro}, DW and O Akhzar-Mehr and PM Sarro and GV Vdovin",

year = "2003",

language = "Undefined/Unknown",

volume = "11",

pages = "2244--2252",

journal = "Optics Express",

issn = "1094-4087",

publisher = "The Optical Society",

number = "18",

}

TY - JOUR

T1 - Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

AU - de Lima Monteiro, DW

AU - Akhzar-Mehr, O

AU - Sarro, PM

AU - Vdovin, GV

PY - 2003

Y1 - 2003

KW - Elektrotechniek

KW - Techniek

KW - ZX CWTS 1.00 <= JFIS < 3.00

M3 - Article

SN - 1094-4087

VL - 11

SP - 2244

EP - 2252

JO - Optics Express

JF - Optics Express

IS - 18

ER -