Single-mask microfabrication of aspherical optics using KOH anisotropic etching of Si

DW de Lima Monteiro, O Akhzar-Mehr, PM Sarro, GV Vdovin

Research output: Contribution to journalArticleScientificpeer-review

50 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)2244-2252
Number of pages9
JournalOptics Express
Volume11
Issue number18
Publication statusPublished - 2003

Keywords

  • Elektrotechniek
  • Techniek
  • ZX CWTS 1.00 <= JFIS < 3.00

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