INIS
waveguides
100%
electron beams
100%
losses
50%
sensitivity
33%
increasing
16%
surfaces
16%
width
16%
roughness
16%
tolerance
16%
resolution
16%
units
16%
efficiency
16%
fabrication
16%
coupling
16%
simulation
16%
scattering
16%
absorption
16%
height
16%
refractive index
16%
optical systems
16%
performance
16%
alignment
16%
transmission
16%
concentration
16%
solutions
16%
plugs
16%
Engineering
Electron Optical Lithography
100%
Waveguide
100%
Loss
40%
Evanescent
40%
Efficiency
20%
Measurement
20%
Electric Losses
20%
Saline Solution
20%
Refractive Index
20%
Performance
20%
Optical Systems
20%
High Resolution
20%
Fabrication
20%
Surface
20%
Transmissions
20%
Direct-Writing
20%
Alignment
20%
Scattering
20%
Fits and Tolerances
20%
One Step
20%
Sidewall Roughness
20%
Physics
Lithography
100%
Detection
100%
Waveguide
100%
Roughness
16%
Area
16%
Plug
16%
Independent Variables
16%
Expansion
16%
High Resolution
16%
Side
16%
Fabrication
16%
Optical Measurement
16%
Increasing
16%
Width
16%
Evanescent Wave
16%
Performance
16%
Refractivity
16%
Earth and Planetary Sciences
Lithography
100%
Waveguide
100%
Loss
50%
Optical Measurement
16%
Show
16%
Refractivity
16%
Monitor
16%
Increasing
16%
Alignment
16%
Expansion
16%
Fabrication
16%
Evanescent Wave
16%
Efficiency
16%
Tolerance
16%
Feasibility
16%
Roughness
16%
Material Science
Waveguide
100%
Lithography
100%
Optical Measurement
16%
Surface Roughness
16%
Refractive Index
16%
Surface
16%
Keyphrases
Analyte Sensing
100%
Refractive Index Unit
33%
Narrow Structure
33%
Induced Scattering
33%