Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope

G Craciun, H Yang, MA Blauw, EWJM van der Drift, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	MME'02 micromechanics Europe
Place of Publication	Bucharest
Publisher	Nat. Inst. for Res. and Development in Microtechnologies
Pages	55-58
Number of pages	4
ISBN (Print)	973-0-02472-3
Publication status	Published - 2002
Event	13th micromechanics Europe workshop MME 2002, Sinaia, Romania - Bucharest Duration: 6 Oct 2002 → 8 Oct 2002

Name
Publisher	Nat. Inst. for Res. and Development in Microtechnologies

Conference	13th micromechanics Europe workshop MME 2002, Sinaia, Romania
Period	6/10/02 → 8/10/02

Keywords

@inproceedings{465724decb64491eb08f0970e1edf4ab,

title = "Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "G Craciun and H Yang and MA Blauw and {van der Drift}, EWJM and PJ French",

year = "2002",

language = "Undefined/Unknown",

isbn = "973-0-02472-3",

publisher = "Nat. Inst. for Res. and Development in Microtechnologies",

pages = "55--58",

booktitle = "MME'02 micromechanics Europe",

note = "13th micromechanics Europe workshop MME 2002, Sinaia, Romania ; Conference date: 06-10-2002 Through 08-10-2002",

}

Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope. / Craciun, G; Yang, H; Blauw, MA et al.
MME'02 micromechanics Europe. Bucharest: Nat. Inst. for Res. and Development in Microtechnologies, 2002. p. 55-58.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Single step cryogenic SF6/O2 plasma etching process for the development of a novel quad gyroscope

AU - Craciun, G

AU - Yang, H

AU - Blauw, MA

AU - van der Drift, EWJM

AU - French, PJ

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 973-0-02472-3

SP - 55

EP - 58

BT - MME'02 micromechanics Europe

PB - Nat. Inst. for Res. and Development in Microtechnologies

CY - Bucharest

T2 - 13th micromechanics Europe workshop MME 2002, Sinaia, Romania

Y2 - 6 October 2002 through 8 October 2002

ER -