Single step electrochemical etching in ammonium fluoride

H Ohji, PJ French

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)109-112
Number of pages4
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume74
Publication statusPublished - 1999

Keywords

  • ZX Int.klas.verslagjaar < 2002

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