Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

G Craciun; H Yang; L Pakula; EWJM van der Drift; PJ French

Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

G Craciun, H Yang, L Pakula, EWJM van der Drift, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004
Editors	Takashi KAWAMURA, Eun-Woong LEE, Yanchang Lu, Kwan James
Place of Publication	Tokyo, Japan
Publisher	The Institute of the Electrical Engineers of Japan
Pages	174-178
Number of pages	5
ISBN (Print)	4-88686-000-1
Publication status	Published - 2004
Event	International conference on Electrical engineering 2004, Sapporo, Japan - Tokyo, Japan Duration: 4 Jul 2004 → 8 Jul 2004

Publication series

Name
Publisher	The Institute of the Electrical Engineers of Japan

Name
Volume	3-1

Conference

Conference	International conference on Electrical engineering 2004, Sapporo, Japan
Period	4/07/04 → 8/07/04

Bibliographical note

ed. is niet bekend

Keywords

Conf.proc. > 3 pag

Cite this

Craciun, G., Yang, H., Pakula, L., van der Drift, EWJM., & French, PJ. (2004). Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process. In T. KAWAMURA, E.-W. LEE, Y. Lu, & K. James (Eds.), ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004 (pp. 174-178). The Institute of the Electrical Engineers of Japan.

Craciun, G ; Yang, H ; Pakula, L et al. / Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process. ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004. editor / Takashi KAWAMURA ; Eun-Woong LEE ; Yanchang Lu ; Kwan James. Tokyo, Japan : The Institute of the Electrical Engineers of Japan, 2004. pp. 174-178

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title = "Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process",

keywords = "Conf.proc. > 3 pag",

author = "G Craciun and H Yang and L Pakula and {van der Drift}, EWJM and PJ French",

note = "ed. is niet bekend; International conference on Electrical engineering 2004, Sapporo, Japan ; Conference date: 04-07-2004 Through 08-07-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "4-88686-000-1",

publisher = "The Institute of the Electrical Engineers of Japan",

pages = "174--178",

editor = "Takashi KAWAMURA and Eun-Woong LEE and Yanchang Lu and Kwan James",

booktitle = "ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004",

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Craciun, G, Yang, H, Pakula, L , van der Drift, EWJM & French, PJ 2004, Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process. in T KAWAMURA, E-W LEE, Y Lu & K James (eds), ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004. The Institute of the Electrical Engineers of Japan, Tokyo, Japan, pp. 174-178, International conference on Electrical engineering 2004, Sapporo, Japan, 4/07/04.

Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process. / Craciun, G; Yang, H; Pakula, L et al.
ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004. ed. / Takashi KAWAMURA; Eun-Woong LEE; Yanchang Lu; Kwan James. Tokyo, Japan: The Institute of the Electrical Engineers of Japan, 2004. p. 174-178.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process

AU - Craciun, G

AU - Yang, H

AU - Pakula, L

AU - van der Drift, EWJM

AU - French, PJ

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 4-88686-000-1

SP - 174

EP - 178

BT - ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004

A2 - KAWAMURA, Takashi

A2 - LEE, Eun-Woong

A2 - Lu, Yanchang

A2 - James, Kwan

PB - The Institute of the Electrical Engineers of Japan

CY - Tokyo, Japan

T2 - International conference on Electrical engineering 2004, Sapporo, Japan

Y2 - 4 July 2004 through 8 July 2004

ER -

Craciun G, Yang H, Pakula L , van der Drift EWJM , French PJ. Single step IC-compatible processing of inertial sensors using SF6-O2 cryogenic plasma process. In KAWAMURA T, LEE EW, Lu Y, James K, editors, ICEE2004; Conference proceedings of the International conference of elecrical engineering 2004. Tokyo, Japan: The Institute of the Electrical Engineers of Japan. 2004. p. 174-178