@inproceedings{f76cc5dd94a34172a228652aa9a648e6,
title = "Single wafer surface micromachined field emission electron source",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "F Santagata and CK Yang and JF Creemer and PJ French and PM Sarro",
year = "2009",
language = "Undefined/Unknown",
isbn = "978-1-4244-2978-3",
publisher = "IEEE Society",
pages = "848--851",
editor = "PM Sarro and C Hierold",
booktitle = "Single wafer surface micromachined field emission electron source",
note = "null ; Conference date: 25-01-2009 Through 29-01-2009",
}