Size and Shape Control of Sub-20 nm Patterns Fabricated Using Focused Electron Beam Induced Processing

S Hari, CW Hagen, T Verduin, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageEnglish
    Pages (from-to)1-7
    Number of pages7
    JournalJournal of Micro/Nanolithography, MEMS, and MOEMS
    Issue number3
    Publication statusPublished - 2014

    Bibliographical note


    Cite this