Size-dependent effective Young's modulus of silicon nitride cantilevers

K Babaei Gavan, HJR Westra, EWJM van der Drift, WJ Venstra, HSJ van der Zant

Research output: Contribution to journal › Article › Scientific › peer-review

Keywords

@article{162b4834d7e841688d37de2b7a47d744,

title = "Size-dependent effective Young's modulus of silicon nitride cantilevers",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{Babaei Gavan}, K and HJR Westra and {van der Drift}, EWJM and WJ Venstra and {van der Zant}, HSJ",

year = "2009",

language = "Undefined/Unknown",

volume = "94",

pages = "233108--1--233108--3",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics Publising LLC",

number = "23",

}

TY - JOUR

T1 - Size-dependent effective Young's modulus of silicon nitride cantilevers

AU - Babaei Gavan, K

AU - Westra, HJR

AU - van der Drift, EWJM

AU - Venstra, WJ

AU - van der Zant, HSJ

PY - 2009

Y1 - 2009

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0003-6951

VL - 94

SP - 233108-1-233108-3

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 23

ER -