Size-dependent effective Young's modulus of silicon nitride cantilevers

K Babaei Gavan, HJR Westra, EWJM van der Drift, WJ Venstra, HSJ van der Zant

Research output: Contribution to journalArticleScientificpeer-review

Original languageUndefined/Unknown
Pages (from-to)233108-1-233108-3
JournalApplied Physics Letters
Volume94
Issue number23
Publication statusPublished - 2009

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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