Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

AT Tran, O Wunnicke, G Pandraud, MD Nguyen, H Schellevis, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

23 Citations (Scopus)
Original languageEnglish
Pages (from-to)118-123
Number of pages6
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Issue numberNovember
Publication statusPublished - 2013

Bibliographical note

Available online 19 February 2013

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