Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

AT Tran; O Wunnicke; G Pandraud; MD Nguyen; H Schellevis; PM Sarro

doi:10.1016/j.sna.2013.01.047

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators

AT Tran, O Wunnicke, G Pandraud, MD Nguyen, H Schellevis, PM Sarro

Electronic Components, Technology and Materials

Research output: Contribution to journal › Article › Scientific › peer-review

23 Citations (Scopus)

Original language	English
Pages (from-to)	118-123
Number of pages	6
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	202
Issue number	November
DOIs	https://doi.org/10.1016/j.sna.2013.01.047
Publication status	Published - 2013

Bibliographical note

Harvest
Available online 19 February 2013

Access to Document

10.1016/j.sna.2013.01.047

Cite this

Tran, AT., Wunnicke, O., Pandraud, G., Nguyen, MD., Schellevis, H., & Sarro, PM. (2013). Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators. Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, 202(November), 118-123. https://doi.org/10.1016/j.sna.2013.01.047

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title = "Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators",

author = "AT Tran and O Wunnicke and G Pandraud and MD Nguyen and H Schellevis and PM Sarro",

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Tran, AT, Wunnicke, O, Pandraud, G, Nguyen, MD, Schellevis, H & Sarro, PM 2013, 'Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators', Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, vol. 202, no. November, pp. 118-123. https://doi.org/10.1016/j.sna.2013.01.047

Slender piezoelectric cantilevers of high quality AlN layers sputtered on Ti thin film for MEMS actuators. / Tran, AT; Wunnicke, O; Pandraud, G et al.
In: Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers, Vol. 202, No. November, 2013, p. 118-123.

Research output: Contribution to journal › Article › Scientific › peer-review

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AU - Tran, AT

AU - Wunnicke, O

AU - Pandraud, G

AU - Nguyen, MD

AU - Schellevis, H

AU - Sarro, PM

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JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

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