Smooth and narrow nanopillars fabricated by ion-beam-induced deposition under charging conditions

P Chen, HWM Salemink, PFA Alkemade

Research output: Contribution to journalArticleScientificpeer-review

4 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)8120-8123
Number of pages4
JournalJapanese Journal of Applied Physics. Part 2, Letters & Express Lettres
Volume47
Issue number10
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS JFIS < 0.75

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