SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

V Rajaraman, G Craciun, H Yang, EWJM van der Drift, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures
Editors	s.n.
Place of Publication	Veldhoven, The Netherlands
Publisher	SAFE
Pages	617-620
Number of pages	4
ISBN (Print)	978-90-73461-49-9
Publication status	Published - 2007
Event	SAFE 2007 - Veldhoven, The Netherlands. Duration: 29 Nov 2007 → 30 Nov 2007

Name
Publisher	SAFE 2007

Conference	SAFE 2007
Period	29/11/07 → 30/11/07

Keywords

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title = "SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)",

keywords = "professional journal papers, Conf.proc. > 3 pag",

author = "V Rajaraman and G Craciun and H Yang and {van der Drift}, EWJM and PJ French",

year = "2007",

language = "Undefined/Unknown",

isbn = "978-90-73461-49-9",

publisher = "SAFE",

pages = "617--620",

editor = "s.n.",

booktitle = "SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures",

note = "SAFE 2007 ; Conference date: 29-11-2007 Through 30-11-2007",

}

SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T). / Rajaraman, V; Craciun, G; Yang, H et al.
SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures. ed. / s.n. Veldhoven, The Netherlands: SAFE, 2007. p. 617-620.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

TY - GEN

T1 - SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures (U_SP_2_I_IC_T)

AU - Rajaraman, V

AU - Craciun, G

AU - Yang, H

AU - van der Drift, EWJM

AU - French, PJ

PY - 2007

Y1 - 2007

KW - professional journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-49-9

SP - 617

EP - 620

BT - SOG fabrication of bulk micromachined and bonded capacitive inertial sensor structures

A2 - s.n., null

PB - SAFE

CY - Veldhoven, The Netherlands

T2 - SAFE 2007

Y2 - 29 November 2007 through 30 November 2007

ER -