SOI digital accelerometer based on pull-in time configuration

L Pakula, V Rajaraman, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationSOI digital accelerometer based on pull-in time configuration
Editors s.n.
Place of Publicationshenzhen, p.r.china
PublisherIEEE NEMS
Pages1-4
Number of pages4
Publication statusPublished - 2009
EventIEEE NEMS- 2009 - shenzhen, p.r.china
Duration: 5 Jan 20098 Jan 2009

Publication series

Name
PublisherIEEE NEMS

Conference

ConferenceIEEE NEMS- 2009
Period5/01/098/01/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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