SOI Micromachined Accelerometers-An Overview

R Vijayekumar

Research output: Book/ReportReportProfessional

Original languageUndefined/Unknown
Place of PublicationThe Netherlands.
PublisherNXP Semiconductors
Number of pages9
VolumeNXP Semiconductors
Publication statusPublished - 2006

Publication series

Name
PublisherNXP Semiconductors

Keywords

  • official reports
  • Geen BTA classificatie

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