@inproceedings{e32adbba6e83461c8f0f16ba475c5505,
title = "Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy",
keywords = "Conf.proc. > 3 pag",
author = "A Sakic and LK Nanver and {van Veen}, G and K Kooijman and P. Vogelsang and TLM Scholtes and {de Boer}, W and WHA Wien and S Milosavljevic and C.Th.H. Heerkens and T Knezevic and I Spee",
year = "2011",
language = "English",
isbn = "978-90-734641-99-4",
publisher = "STW",
pages = "92--95",
editor = "A Smeulders and {van den Drift}, R and F Karelse and D Stroobandt",
booktitle = "ICT.OPEN: Micro technology and micro devices (SAFE 2011)",
note = "ICT.OPEN 2011 ; Conference date: 14-11-2011 Through 15-11-2011",
}