Solid-state backscattered-electron detector for sub-keV imaging in scanning electron microscopy

A Sakic, LK Nanver, G van Veen, K Kooijman, P. Vogelsang, TLM Scholtes, W de Boer, WHA Wien, S Milosavljevic, C.Th.H. Heerkens, T Knezevic, I Spee

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationICT.OPEN: Micro technology and micro devices (SAFE 2011)
EditorsA Smeulders, R van den Drift, F Karelse, D Stroobandt
Place of PublicationVeldhoven, The Netherlands
PublisherSTW
Pages92-95
Number of pages4
ISBN (Print)978-90-734641-99-4
Publication statusPublished - 2011
EventICT.OPEN 2011 - Veldhoven, The Netherlands
Duration: 14 Nov 201115 Nov 2011

Publication series

Name
PublisherSTW

Conference

ConferenceICT.OPEN 2011
Period14/11/1115/11/11

Keywords

  • Conf.proc. > 3 pag

Cite this