TY - JOUR
T1 - Solution-Based Fabrication of Polycrystalline Si Thin-Film Transistors from Recycled Polysilanes
AU - Sberna, Paolo
AU - Trifunovic, Miki
AU - Ishihara, Ryoichi
PY - 2017/6/11
Y1 - 2017/6/11
N2 - Currently, research has been focusing on printing and laser crystallization of cyclosilanes, bringing to life polycrystalline silicon (poly-Si) thin-film transistors (TFTs) with outstanding properties. However, the synthesis of these Sibased inks is generally complex and expensive. Here, we prove that a polysilane ink, obtained as a byproduct of silicon gases and derivatives, can be used successfully for the synthesis of poly-Si by laser annealing, at room temperature, and for n- and p-channel TFTs. The devices, fabricated according to CMOS compatible processes at 350 °C, showed field effect mobilities up to 8 and 2 cm2/(V s) for n- and p-type TFTs, respectively. The presented method combines a low-cost coating technique with the usage of recycled material, opening a route to a convenient and sustainable production of large-area, flexible, and even disposable/single-use electronics.
AB - Currently, research has been focusing on printing and laser crystallization of cyclosilanes, bringing to life polycrystalline silicon (poly-Si) thin-film transistors (TFTs) with outstanding properties. However, the synthesis of these Sibased inks is generally complex and expensive. Here, we prove that a polysilane ink, obtained as a byproduct of silicon gases and derivatives, can be used successfully for the synthesis of poly-Si by laser annealing, at room temperature, and for n- and p-channel TFTs. The devices, fabricated according to CMOS compatible processes at 350 °C, showed field effect mobilities up to 8 and 2 cm2/(V s) for n- and p-type TFTs, respectively. The presented method combines a low-cost coating technique with the usage of recycled material, opening a route to a convenient and sustainable production of large-area, flexible, and even disposable/single-use electronics.
KW - Disilane byproduct
KW - Byproduct recycle
KW - Polysilane
KW - Low-temperature fabrication
KW - Thin-film transistor
KW - Polycrystalline silicon
KW - Solution processing
UR - http://resolver.tudelft.nl/uuid:57ba5640-0606-4ede-a227-e8b07e0b88f7
U2 - 10.1021/acssuschemeng.7b00626
DO - 10.1021/acssuschemeng.7b00626
M3 - Article
SN - 2168-0485
VL - 5
SP - 5642
EP - 5645
JO - ACS Sustainable Chemistry and Engineering
JF - ACS Sustainable Chemistry and Engineering
IS - 7
ER -