Solutions to a proxomity effect in high resolution electron beam induced deposition

WF van Dorp, S Lazar, CW Hagen, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    20 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1603-1608
    Number of pages6
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Volume25
    Issue number5
    Publication statusPublished - 2007

    Keywords

    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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