@article{ee422cc11c004952ac0a19f14e30b1be,
title = "Solutions to a proxomity effect in high resolution electron beam induced deposition",
keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "{van Dorp}, WF and S Lazar and CW Hagen and P Kruit",
year = "2007",
language = "Undefined/Unknown",
volume = "25",
pages = "1603--1608",
journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",
issn = "1071-1023",
publisher = "AVS Science and Technology Society",
number = "5",
}