Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.

N Iossad, BD Jackson, F Ferro, JR Gao, SN Polyakov, P Dimitriev, TM Klapwijk

    Research output: Contribution to journalArticleScientificpeer-review

    8 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)1-5
    Number of pages5
    JournalSuperconductor Science & Technology
    Publication statusPublished - 1999

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