Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.

N Iossad, BD Jackson, F Ferro, JR Gao, SN Polyakov, P Dimitriev, TM Klapwijk

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	1-5
Number of pages	5
Journal	Superconductor Science & Technology
Volume	12
Publication status	Published - 1999

Cite this

@article{06b6f911e7b843d48c7578782c855dd2,

title = "Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.",

author = "N Iossad and BD Jackson and F Ferro and JR Gao and SN Polyakov and P Dimitriev and TM Klapwijk",

year = "1999",

language = "Undefined/Unknown",

volume = "12",

pages = "1--5",

journal = "Superconductor Science & Technology",

issn = "0953-2048",

publisher = "IOP Publishing",

}

TY - JOUR

T1 - Source optimization for magnetron sputter deposition of Nb TiN tuning elements for SIS THz detectors.

AU - Iossad, N

AU - Jackson, BD

AU - Ferro, F

AU - Gao, JR

AU - Polyakov, SN

AU - Dimitriev, P

AU - Klapwijk, TM

PY - 1999

Y1 - 1999

M3 - Article

SN - 0953-2048

VL - 12

SP - 1

EP - 5

JO - Superconductor Science & Technology

JF - Superconductor Science & Technology

ER -