Spatial dispersion of crystals as a critical problem for deep UV lithography

A Serebriakov, F Bociort, JJM Braat

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)566-569
Number of pages4
JournalJournal of Optical Technology
Volume70
Issue number8
Publication statusPublished - 2003

Keywords

  • professional journal papers
  • ZX CWTS JFIS < 1.00

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