Spatial dispersion of crystals as a critical problem for deep UV lithography

A Serebriakov, F Bociort, JJM Braat

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	566-569
Number of pages	4
Journal	Journal of Optical Technology
Volume	70
Issue number	8
Publication status	Published - 2003

Keywords

@article{0849f1cf862f4cca96e697586b345d53,

title = "Spatial dispersion of crystals as a critical problem for deep UV lithography",

keywords = "professional journal papers, ZX CWTS JFIS < 1.00",

author = "A Serebriakov and F Bociort and JJM Braat",

year = "2003",

language = "Undefined/Unknown",

volume = "70",

pages = "566--569",

journal = "Journal of Optical Technology",

issn = "1070-9762",

publisher = "The Optical Society",

number = "8",

}