Spatial mode projection for side-wall angle measurements

L Cisotto; Y Zhu; SF Pereira; HP Urbach

doi:10.1117/12.2184738

Spatial mode projection for side-wall angle measurements

ImPhys/Optics

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	English
Title of host publication	Modeling Aspects in Optical Metrology V
Editors	RM Silver, B Bodermann, K Frenner
Place of Publication	Bellingham, WA, USA
Publisher	SPIE
Pages	1-8
Number of pages	8
ISBN (Print)	978-162841686-2
DOIs	https://doi.org/10.1117/12.2184738
Publication status	Published - 2015
Event	Modeling Aspects in Optical Metrology V, Munich, Germany - Bellingham, WA, USA Duration: 23 Jun 2015 → 25 Jun 2015

Publication series

Name
Publisher	SPIE

Name	Proceedings of SPIE- International Society for Optical Engineering
Volume	9526
ISSN (Print)	0277-786X

Conference

Conference	Modeling Aspects in Optical Metrology V, Munich, Germany
Period	23/06/15 → 25/06/15

Access to Document

10.1117/12.2184738

http://resolver.tudelft.nl/uuid:22b7dde3-c97c-4168-b804-6aae3a81ecfe

Cite this

@inproceedings{e895241164b2487a886e065bd8a7b419,

title = "Spatial mode projection for side-wall angle measurements",

author = "L Cisotto and Y Zhu and SF Pereira and HP Urbach",

note = "Harvest; Modeling Aspects in Optical Metrology V, Munich, Germany ; Conference date: 23-06-2015 Through 25-06-2015",

year = "2015",

doi = "10.1117/12.2184738",

language = "English",

isbn = "978-162841686-2",

publisher = "SPIE",

pages = "1--8",

editor = "RM Silver and B Bodermann and K Frenner",

booktitle = "Modeling Aspects in Optical Metrology V",

address = "United States",

}

Cisotto, L, Zhu, Y, Pereira, SF & Urbach, HP 2015, Spatial mode projection for side-wall angle measurements. in RM Silver, B Bodermann & K Frenner (eds), Modeling Aspects in Optical Metrology V. Proceedings of SPIE- International Society for Optical Engineering, vol. 9526, SPIE, Bellingham, WA, USA, pp. 1-8, Modeling Aspects in Optical Metrology V, Munich, Germany, 23/06/15. https://doi.org/10.1117/12.2184738

Spatial mode projection for side-wall angle measurements. / Cisotto, L; Zhu, Y; Pereira, SF ; Urbach, HP.

Modeling Aspects in Optical Metrology V. ed. / RM Silver; B Bodermann; K Frenner. Bellingham, WA, USA : SPIE, 2015. p. 1-8 (Proceedings of SPIE- International Society for Optical Engineering; Vol. 9526).

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Spatial mode projection for side-wall angle measurements

AU - Cisotto, L

AU - Zhu, Y

AU - Pereira, SF

AU - Urbach, HP

N1 - Harvest

PY - 2015

Y1 - 2015

UR - http://resolver.tudelft.nl/uuid:22b7dde3-c97c-4168-b804-6aae3a81ecfe

U2 - 10.1117/12.2184738

DO - 10.1117/12.2184738

M3 - Conference contribution

SN - 978-162841686-2

SP - 1

EP - 8

BT - Modeling Aspects in Optical Metrology V

A2 - Silver, RM

A2 - Bodermann, B

A2 - Frenner, K

PB - SPIE

CY - Bellingham, WA, USA

T2 - Modeling Aspects in Optical Metrology V, Munich, Germany

Y2 - 23 June 2015 through 25 June 2015

ER -