@inproceedings{e895241164b2487a886e065bd8a7b419,
title = "Spatial mode projection for side-wall angle measurements",
author = "L Cisotto and Y Zhu and SF Pereira and HP Urbach",
note = "Harvest; Modeling Aspects in Optical Metrology V, Munich, Germany ; Conference date: 23-06-2015 Through 25-06-2015",
year = "2015",
doi = "10.1117/12.2184738",
language = "English",
isbn = "978-162841686-2",
publisher = "SPIE",
pages = "1--8",
editor = "RM Silver and B Bodermann and K Frenner",
booktitle = "Modeling Aspects in Optical Metrology V",
address = "United States",
}