Spatial resolution limits in electron-beam-induced deposition

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Keywords

@article{40df2f036bd0472b9afff3a29b9687a6,

title = "Spatial resolution limits in electron-beam-induced deposition",

keywords = "ZX CWTS 1.00 <= JFIS < 3.00",

author = "N Silvis-Cividjian and CW Hagen and P Kruit",

year = "2005",

language = "Undefined/Unknown",

volume = "98",

pages = "084905--1--084905--12",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "AIP Publishing",

number = "8",

}