Spatial resolution limits in electron-beam-induced deposition

N Silvis-Cividjian, CW Hagen, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    87 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)084905-1-084905-12
    JournalJournal of Applied Physics
    Volume98
    Issue number8
    Publication statusPublished - 2005

    Keywords

    • ZX CWTS 1.00 <= JFIS < 3.00

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