Special Issue of Microelectronic Engineering on Micro- and Nanopatterning 2015

Cornelis W. Hagen, Paul F A Alkemade

Research output: Contribution to journal › Editorial › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Pages (from-to)	A1
Journal	Microelectronic Engineering
Volume	155
DOIs	https://doi.org/10.1016/j.mee.2016.05.020
Publication status	Published - 2016

Access to Document

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title = "Special Issue of Microelectronic Engineering on Micro- and Nanopatterning 2015",

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T1 - Special Issue of Microelectronic Engineering on Micro- and Nanopatterning 2015

AU - Hagen, Cornelis W.

AU - Alkemade, Paul F A

PY - 2016

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U2 - 10.1016/j.mee.2016.05.020

DO - 10.1016/j.mee.2016.05.020

M3 - Editorial

SN - 0167-9317

VL - 155

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JO - Microelectronic Engineering

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