Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

E Boellaard, PN Pham, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	81-86
Number of pages	6
ISBN (Print)	90-73461-33-2
Publication status	Published - 2002
Event	SAFE, Veldhoven, NL; - Utrecht Duration: 27 Nov 2002 → 28 Nov 2002

Name
Publisher	STW Technology Foundation

Conference	SAFE, Veldhoven, NL;
Period	27/11/02 → 28/11/02

CD-ROM

Keywords

@inproceedings{1ece9d488a0b404eb1b0bd7abda8de5a,

title = "Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison",

keywords = "Conf.proc. > 3 pag",

author = "E Boellaard and PN Pham and PM Sarro and JN Burghartz",

note = "CD-ROM; SAFE, Veldhoven, NL; ; Conference date: 27-11-2002 Through 28-11-2002",

year = "2002",

language = "Undefined/Unknown",

isbn = "90-73461-33-2",

publisher = "STW Technology Foundation",

pages = "81--86",

booktitle = "SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop",

}

Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison. / Boellaard, E; Pham, PN; Sarro, PM et al.
SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop. Utrecht: STW Technology Foundation, 2002. p. 81-86.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

AU - Boellaard, E

AU - Pham, PN

AU - Sarro, PM

AU - Burghartz, JN

N1 - CD-ROM

PY - 2002

Y1 - 2002

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 90-73461-33-2

SP - 81

EP - 86

BT - SAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop

PB - STW Technology Foundation

CY - Utrecht

T2 - SAFE, Veldhoven, NL;

Y2 - 27 November 2002 through 28 November 2002

ER -