Spin, spray coating and electrodeposition of photoresist for MEMS structures - a comparison

E Boellaard, PN Pham, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE 2002 Proceedings of 5th Semiconductor Advances for Future Electronics Workshop
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages81-86
Number of pages6
ISBN (Print)90-73461-33-2
Publication statusPublished - 2002
EventSAFE, Veldhoven, NL; - Utrecht
Duration: 27 Nov 200228 Nov 2002

Publication series

Name
PublisherSTW Technology Foundation

Conference

ConferenceSAFE, Veldhoven, NL;
Period27/11/0228/11/02

Keywords

  • Conf.proc. > 3 pag

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