Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines

EH Mulder, P Kruit

    Research output: Contribution to journalArticleScientificpeer-review

    2 Citations (Scopus)
    Original languageUndefined/Unknown
    Pages (from-to)159-162
    Number of pages4
    JournalMicroelectronic Engineering
    Volume41/42
    Publication statusPublished - 1998

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