Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines

EH Mulder, P Kruit

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	159-162
Number of pages	4
Journal	Microelectronic Engineering
Volume	41/42
Publication status	Published - 1998

Cite this

@article{a81c291c52fc4e319f0b8833f79aad88,

title = "Spot Movement due to signal transients in multiple deflector blankers in electron beam lithography machines",

author = "EH Mulder and P Kruit",

year = "1998",

language = "Undefined/Unknown",

volume = "41/42",

pages = "159--162",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier",

}