Spray coating of AZ4562 photoresist for MEMS applications

PN Pham, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE2001
Editors H Varwijk
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages154-158
Number of pages5
ISBN (Print)90-73461-28-6
Publication statusPublished - 2001
EventSemiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven - Utrecht
Duration: 28 Nov 200130 Nov 2001

Publication series

Name
PublisherSTW technology foundation

Conference

ConferenceSemiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven
Period28/11/0130/11/01

Keywords

  • ZX Int.klas.verslagjaar < 2002

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