Spray coating of AZ4562 photoresist for MEMS applications

PN Pham; PM Sarro; JN Burghartz

Spray coating of AZ4562 photoresist for MEMS applications

PN Pham, PM Sarro, JN Burghartz

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE2001
Editors	H Varwijk
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	154-158
Number of pages	5
ISBN (Print)	90-73461-28-6
Publication status	Published - 2001
Event	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven - Utrecht Duration: 28 Nov 2001 → 30 Nov 2001

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven
Period	28/11/01 → 30/11/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{c458835ffd864bebb426c6c75780174c,

title = "Spray coating of AZ4562 photoresist for MEMS applications",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "PN Pham and PM Sarro and JN Burghartz",

year = "2001",

language = "Undefined/Unknown",

isbn = "90-73461-28-6",

publisher = "STW Technology Foundation",

pages = "154--158",

editor = "{H Varwijk}",

booktitle = "SAFE2001",

note = "Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven ; Conference date: 28-11-2001 Through 30-11-2001",

}

TY - GEN

T1 - Spray coating of AZ4562 photoresist for MEMS applications

AU - Pham, PN

AU - Sarro, PM

AU - Burghartz, JN

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-28-6

SP - 154

EP - 158

BT - SAFE2001

A2 - H Varwijk, null

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor Advances for Future Electronics - Program for Research on Integrated Systems and Circuits - Semiconductor Sensor and Actuator Technology, Veldhoven

Y2 - 28 November 2001 through 30 November 2001

ER -