Spray coating of photoresist for pattern transfer on high topography surfaces

NP Pham, JN Burghartz, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

94 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)691-697
Number of pages7
JournalJournal of Micromechanics and Microengineering
Volume15
Issue number4
DOIs
Publication statusPublished - 2005

Keywords

  • academic journal papers
  • ZX CWTS 1.00 <= JFIS < 3.00

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