Spray coating of photoresist for pattern transfer on high topography surfaces

NP Pham, JN Burghartz, PM Sarro

Research output: Contribution to journal › Article › Scientific › peer-review

101 Citations (Scopus)

Original language	Undefined/Unknown
Pages (from-to)	691-697
Number of pages	7
Journal	Journal of Micromechanics and Microengineering
Volume	15
Issue number	4
DOIs	https://doi.org/doi:10.1088/0960-1317/15/4/003
Publication status	Published - 2005

Keywords

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title = "Spray coating of photoresist for pattern transfer on high topography surfaces",

keywords = "academic journal papers, ZX CWTS 1.00 <= JFIS < 3.00",

author = "NP Pham and JN Burghartz and PM Sarro",

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journal = "Journal of Micromechanics and Microengineering",

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TY - JOUR

T1 - Spray coating of photoresist for pattern transfer on high topography surfaces

AU - Pham, NP

AU - Burghartz, JN

AU - Sarro, PM

PY - 2005

Y1 - 2005

KW - academic journal papers

KW - ZX CWTS 1.00 <= JFIS < 3.00

U2 - doi:10.1088/0960-1317/15/4/003

DO - doi:10.1088/0960-1317/15/4/003

M3 - Article

SN - 0960-1317

VL - 15

SP - 691

EP - 697

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 4

ER -