Sputtered aluminum-nitride for integration in IC processes

I Hajas, H Schellevis, LK Nanver

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationSAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics
Place of PublicationUtrecht
PublisherSTW Technology Foundation
Pages643-646
Number of pages4
ISBN (Print)90-73461-43-X
Publication statusPublished - 2004
EventSemiconductor advances for future electronics, Veldhoven, The Netherland - Utrecht
Duration: 25 Nov 200426 Nov 2004

Publication series

Name
PublisherSTW Technology Foundation

Conference

ConferenceSemiconductor advances for future electronics, Veldhoven, The Netherland
Period25/11/0426/11/04

Keywords

  • Vakpubl., Overig wet. > 3 pag

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