Sputtered aluminum-nitride for integration in IC processes

I Hajas; H Schellevis; LK Nanver

Sputtered aluminum-nitride for integration in IC processes

I Hajas, H Schellevis, LK Nanver

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	643-646
Number of pages	4
ISBN (Print)	90-73461-43-X
Publication status	Published - 2004
Event	Semiconductor advances for future electronics, Veldhoven, The Netherland - Utrecht Duration: 25 Nov 2004 → 26 Nov 2004

Publication series

Name
Publisher	STW Technology Foundation

Conference

Conference	Semiconductor advances for future electronics, Veldhoven, The Netherland
Period	25/11/04 → 26/11/04

Bibliographical note

ed. is niet bekend

Keywords

Vakpubl., Overig wet. > 3 pag

Cite this

@inproceedings{794c68eee7444b4ba03ee5828f5e83b0,

title = "Sputtered aluminum-nitride for integration in IC processes",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "I Hajas and H Schellevis and LK Nanver",

note = "ed. is niet bekend; Semiconductor advances for future electronics, Veldhoven, The Netherland ; Conference date: 25-11-2004 Through 26-11-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "90-73461-43-X",

publisher = "STW Technology Foundation",

pages = "643--646",

booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",

}

TY - GEN

T1 - Sputtered aluminum-nitride for integration in IC processes

AU - Hajas, I

AU - Schellevis, H

AU - Nanver, LK

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 90-73461-43-X

SP - 643

EP - 646

BT - SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics

PB - STW Technology Foundation

CY - Utrecht

T2 - Semiconductor advances for future electronics, Veldhoven, The Netherland

Y2 - 25 November 2004 through 26 November 2004

ER -