@inproceedings{794c68eee7444b4ba03ee5828f5e83b0,
title = "Sputtered aluminum-nitride for integration in IC processes",
keywords = "Vakpubl., Overig wet. > 3 pag",
author = "I Hajas and H Schellevis and LK Nanver",
note = "ed. is niet bekend; Semiconductor advances for future electronics, Veldhoven, The Netherland ; Conference date: 25-11-2004 Through 26-11-2004",
year = "2004",
language = "Undefined/Unknown",
isbn = "90-73461-43-X",
publisher = "STW Technology Foundation",
pages = "643--646",
booktitle = "SAFE & ProRISC 2004; Proceedings of semiconductor advances for future electronics",
}