Sputtering limits versus signal-to-noise limits in the observation of Sn balles in a Ga+ microscope

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	2107-2115
Number of pages	9
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Volume	26
Issue number	6
Publication status	Published - 2008

Keywords

@article{427c275b56f444598f487fbc9ccd3f25,

title = "Sputtering limits versus signal-to-noise limits in the observation of Sn balles in a Ga+ microscope",

keywords = "CWTS 0.75 <= JFIS < 2.00",

author = "V Castaldo and CW Hagen and B Rieger and P Kruit",

year = "2008",

language = "Undefined/Unknown",

volume = "26",

pages = "2107--2115",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "6",

}

TY - JOUR

T1 - Sputtering limits versus signal-to-noise limits in the observation of Sn balles in a Ga+ microscope

AU - Castaldo, V

AU - Hagen, CW

AU - Rieger, B

AU - Kruit, P

PY - 2008

Y1 - 2008

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

VL - 26

SP - 2107

EP - 2115

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 6

ER -