Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	074021(1)-074021(2)
Journal	Journal of Micromechanics and Microengineering
Volume	19
Publication status	Published - 2009

Keywords

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title = "Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

year = "2009",

language = "Undefined/Unknown",

volume = "19",

pages = "074021(1)--074021(2)",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

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}

TY - JOUR

T1 - Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2009

Y1 - 2009

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 19

SP - 074021(1)-074021(2)

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

ER -