Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Proceedings of MME 2008
Editors	s.n.
Place of Publication	aachen,germany
Publisher	MME
Pages	355-358
Number of pages	4
ISBN (Print)	978-3-00-025529-8
Publication status	Published - 2008
Event	MME 2008,aachen,germany - aachen,germany Duration: 28 Sept 2008 → 30 Sept 2008

Name
Publisher	MME

Conference	MME 2008,aachen,germany
Period	28/09/08 → 30/09/08

Keywords

@inproceedings{01ef5f2640724d118990db76e0019d81,

title = "Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime",

keywords = "conference contrib. non-refer., Conf.proc. > 3 pag",

author = "L Mol and LA Rocha and RF Wolffenbuttel",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-3-00-025529-8",

publisher = "MME",

pages = "355--358",

editor = "s.n.",

booktitle = "Proceedings of MME 2008",

note = "MME 2008,aachen,germany ; Conference date: 28-09-2008 Through 30-09-2008",

}

TY - GEN

T1 - Squeezed film damping measurements on a parallel-plate MEMS in the free molecule regime

AU - Mol, L

AU - Rocha, LA

AU - Wolffenbuttel, RF

PY - 2008

Y1 - 2008

KW - conference contrib. non-refer.

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-3-00-025529-8

SP - 355

EP - 358

BT - Proceedings of MME 2008

A2 - s.n., null

PB - MME

CY - aachen,germany

T2 - MME 2008,aachen,germany

Y2 - 28 September 2008 through 30 September 2008

ER -