Stability characterization of high-sensitivity silicon-based EUV photodiodes in a detrimental environment

L Shi, S Nihtianov, LK Nanver, F Scholze

Research output: Contribution to journalArticleScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Pages (from-to)1699-1707
Number of pages9
JournalIEEE Sensors Journal
Volume13
Issue number5
DOIs
Publication statusPublished - 2013

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