Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes

L Shi, F Sarubbi, S Nihtianov, LK Nanver, F Scholze

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionProfessional

Original languageUndefined/Unknown
Title of host publicationProc. of SAFE 2009
EditorsPJ French
Place of PublicationVeldhoven, the Netherlands
PublisherSTW
Pages530-533
Number of pages4
ISBN (Print)978-90-73461-62-8
Publication statusPublished - 2009
EventSAFE 2009 - Veldhoven, The Netherlands
Duration: 26 Dec 200927 Dec 2009

Publication series

Name
PublisherSTW

Conference

ConferenceSAFE 2009
Period26/12/0927/12/09

Keywords

  • Vakpubl., Overig wet. > 3 pag

Cite this

Shi, L., Sarubbi, F., Nihtianov, S., Nanver, LK., & Scholze, F. (2009). Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes. In PJ. French (Ed.), Proc. of SAFE 2009 (pp. 530-533). STW.