Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes

L Shi, F Sarubbi, S Nihtianov, LK Nanver, F Scholze

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Professional

Original language	Undefined/Unknown
Title of host publication	Proc. of SAFE 2009
Editors	PJ French
Place of Publication	Veldhoven, the Netherlands
Publisher	STW
Pages	530-533
Number of pages	4
ISBN (Print)	978-90-73461-62-8
Publication status	Published - 2009
Event	SAFE 2009 - Veldhoven, The Netherlands Duration: 26 Dec 2009 → 27 Dec 2009

Name
Publisher	STW

Conference	SAFE 2009
Period	26/12/09 → 27/12/09

Keywords

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title = "Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes",

keywords = "Vakpubl., Overig wet. > 3 pag",

author = "L Shi and F Sarubbi and S Nihtianov and LK Nanver and F Scholze",

year = "2009",

language = "Undefined/Unknown",

isbn = "978-90-73461-62-8",

publisher = "STW",

pages = "530--533",

editor = "PJ French",

booktitle = "Proc. of SAFE 2009",

note = "SAFE 2009 ; Conference date: 26-12-2009 Through 27-12-2009",

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TY - GEN

T1 - Stability Investigation of High Performance Silicon-Based DUV/EUV Photodiodes

AU - Shi, L

AU - Sarubbi, F

AU - Nihtianov, S

AU - Nanver, LK

AU - Scholze, F

PY - 2009

Y1 - 2009

KW - Vakpubl., Overig wet. > 3 pag

M3 - Conference contribution

SN - 978-90-73461-62-8

SP - 530

EP - 533

BT - Proc. of SAFE 2009

A2 - French, PJ

PB - STW

CY - Veldhoven, the Netherlands

T2 - SAFE 2009

Y2 - 26 December 2009 through 27 December 2009

ER -