@inproceedings{43f29bc5d5c146d793e01870257701bb,
title = "Stability of the micromachined membrane deformable mirror as a freeform optical element",
author = "GV Vdovin and OA Soloviev and S Patlan",
note = "NEO; Novel Optical Systems Design and Optimization XVII, San Diego, CA, USA ; Conference date: 17-08-2014 Through 19-08-2014",
year = "2014",
doi = "10.1117/12.2063243",
language = "English",
isbn = "9781628412208",
publisher = "SPIE",
pages = "91930L--1--91930L--7",
editor = "{Groot Gregory}, G and AJ Davis",
booktitle = "Novel Optical Systems Design and Optimization XVII",
address = "United States",
}