Stability of voltage references based on the pull-in of a micromechanical structure

LA Machado da Rocha, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationEurosensors 2002
Place of PublicationPrague
PublisherCzech Technical University
Pages723-726
Number of pages4
Publication statusPublished - 2002
Event16th European conference on solid-state transducers - Prague
Duration: 15 Sept 200218 Sept 2002

Publication series

Name
PublisherCzech Technical University

Conference

Conference16th European conference on solid-state transducers
Period15/09/0218/09/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

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