Static capacitive pressure sensing using a single graphene drumg

Dejan Davidovikj, Paul H. Scheepers, Herre S.J. Van Der Zant, Peter G. Steeneken

Research output: Contribution to journalArticleScientificpeer-review

15 Citations (Scopus)
21 Downloads (Pure)

Abstract

To realize nanomechanical graphene-based pressure sensors, it is beneficial to have a method to electrically readout the static displacement of a suspended graphene membrane. Capacitive readout, typical in micro-electromechanical systems, gets increasingly challenging as one starts shrinking the dimensions of these devices because the expected responsivity of such devices is below 0.1 aF/Pa. To overcome the challenges of detecting small capacitance changes, we design an electrical readout device fabricated on top of an insulating quartz substrate, maximizing the contribution of the suspended membrane to the total capacitance of the device. The capacitance of the drum is further increased by reducing the gap size to 110 nm. Using an external pressure load, we demonstrate the successful detection of capacitance changes of a single graphene drum down to 50 aF, and pressure differences down to 25 mbar.
Original languageEnglish
Pages (from-to)43205-43210
JournalACS Applied Materials and Interfaces
Volume9
Issue number49
DOIs
Publication statusPublished - 2017

Keywords

  • graphene drum
  • minimizing parasitic capacitance
  • nanomechanics
  • pressure sensor
  • static capacitive readout
  • two-dimensional materials

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  • Two-dimensional membranes in motion

    Davidovikj, D., 2018, 156 p.

    Research output: ThesisDissertation (TU Delft)

    Open Access
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