Static crack growth and fatigue modeling for silicon MEMS

WM van Spengen

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageEnglish
Title of host publicationProceedings of the 21st Micromechanics and Micro systems Europe Workshop
EditorsL Abelmann, JPJ Groenland, JW van Honschoten, H Honschoten
Place of PublicationEnschede
PublisherU Twente
Pages285-288
Number of pages4
ISBN (Print)978 90 816737 1 6
Publication statusPublished - 2011
Event21st Micromechanics and Micro systems Europe Workshop - Enschede
Duration: 26 Sep 201029 Sep 2010

Publication series

Name
PublisherU Twente

Conference

Conference21st Micromechanics and Micro systems Europe Workshop
Period26/09/1029/09/10

Bibliographical note

neo

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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