@inproceedings{4e0b2148d47641b99f36e7b2a94aae38,
title = "Static crack growth and fatigue modeling for silicon MEMS",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "{van Spengen}, WM",
note = "neo; 21st Micromechanics and Micro systems Europe Workshop ; Conference date: 26-09-2010 Through 29-09-2010",
year = "2011",
language = "English",
isbn = "978 90 816737 1 6",
publisher = "U Twente",
pages = "285--288",
editor = "L Abelmann and JPJ Groenland and {van Honschoten}, JW and H Honschoten",
booktitle = "Proceedings of the 21st Micromechanics and Micro systems Europe Workshop",
}