Static crack growth and fatigue modeling for silicon MEMS

WM van Spengen

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	57-68
Number of pages	12
Journal	Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume	183
Publication status	Published - 2012

Keywords

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AU - van Spengen, WM

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JO - Sensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers

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