Static crack growth and fatigue modeling for silicon MEMS

Research output: Contribution to journalArticleScientificpeer-review

11 Citations (Scopus)
Original languageEnglish
Pages (from-to)57-68
Number of pages12
JournalSensors and Actuators A: Physical: an international journal devoted to research and development of physical and chemical transducers
Volume183
Publication statusPublished - 2012

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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