Statically balanced compliant micro mechanisms (SB-MEMS): a breakthrough in precision engineering

N Tolou, JA Gallego Sanchez, JL Herder

Research output: Contribution to journal › Article › Professional

Original language	English
Pages (from-to)	20-25
Number of pages	6
Journal	Mikroniek: vakblad voor precisie-technologie
Volume	6
Publication status	Published - 2010

Keywords

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title = "Statically balanced compliant micro mechanisms (SB-MEMS): a breakthrough in precision engineering",

keywords = "academic journal papers, Vakpubl., Overig wet. > 3 pag",

author = "N Tolou and {Gallego Sanchez}, JA and JL Herder",

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language = "English",

volume = "6",

pages = "20--25",

journal = "Mikroniek: vakblad voor precisie-technologie",

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TY - JOUR

T1 - Statically balanced compliant micro mechanisms (SB-MEMS): a breakthrough in precision engineering

AU - Tolou, N

AU - Gallego Sanchez, JA

AU - Herder, JL

PY - 2010

Y1 - 2010

KW - academic journal papers

KW - Vakpubl., Overig wet. > 3 pag

M3 - Article

SN - 0026-3699

VL - 6

SP - 20

EP - 25

JO - Mikroniek: vakblad voor precisie-technologie

JF - Mikroniek: vakblad voor precisie-technologie

ER -