Statically Balanced MEMS

N Tolou (Inventor), JL Herder (Inventor)

Research output: Patent

Original languageEnglish
Patent number2005181
IPCOCT-10-032
Priority date30/07/10
Publication statusPublished - 2012

Keywords

  • Octrooi

Cite this

Tolou, N., & Herder, JL. (2012). IPC No. OCT-10-032. Statically Balanced MEMS. (Patent No. 2005181).