Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

WF van Dorp, B van Someren, CW Hagen, P Kruit, P. A. Crozier

    Research output: Contribution to journalArticleScientificpeer-review

    Original languageUndefined/Unknown
    Pages (from-to)618-622
    Number of pages5
    JournalJournal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
    Issue number2
    Publication statusPublished - 2006


    • academic journal papers
    • CWTS 0.75 <= JFIS < 2.00

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