Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

WF van Dorp, B van Someren, CW Hagen, P Kruit, P. A. Crozier

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	618-622
Number of pages	5
Journal	Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures
Issue number	2
Publication status	Published - 2006

Keywords

@article{db2a44dfdf81474ba5d8f456b3bec72e,

title = "Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "{van Dorp}, WF and {van Someren}, B and CW Hagen and P Kruit and {A. Crozier}, P.",

year = "2006",

language = "Undefined/Unknown",

pages = "618--622",

journal = "Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures",

issn = "1071-1023",

publisher = "AVS Science and Technology Society",

number = "2",

}

TY - JOUR

T1 - Statistical variation analysis of sub-5 nanometer sized electron beam induced depositis

AU - van Dorp, WF

AU - van Someren, B

AU - Hagen, CW

AU - Kruit, P

AU - A. Crozier, P.

PY - 2006

Y1 - 2006

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 1071-1023

SP - 618

EP - 622

JO - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

JF - Journal of Vacuum Science and Technology. Part B: Microelectronics and Nanometer Structures

IS - 2

ER -