Step coverage of ALD nanolayers on 3D microstructures

HTM Pham, L Constanzo, CR de Boer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationAPCTP-ASEAN workshop on advanced material science and nanotechnology
EditorsH van Nguyen
Place of PublicationNha Trang, Vietnam
PublisherAcademic press of vietnam academy of science and technology
Pages547-552
Number of pages6
ISBN (Print)978-909023470
Publication statusPublished - 2008
EventAPCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam - Nha Trang, Vietnam
Duration: 15 Sep 200820 Sep 2008

Publication series

Name
PublisherAcademic press of vietnam academy of science and technology

Conference

ConferenceAPCTP-ASEAN workshop on advanced material science and nanotechnology proceedings, Nha Trang, Vietnam
Period15/09/0820/09/08

Keywords

  • Elektrotechniek
  • Techniek
  • conference contrib. refereed
  • Conf.proc. > 3 pag

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