Stiction-driven sealing of surface micromachined channels

B Morana; G Pandraud; F Santagata; JF Creemer; PM Sarro

doi:10.1109/MEMSYS.2012.6170202

Stiction-driven sealing of surface micromachined channels

B Morana, G Pandraud, F Santagata, JF Creemer, PM Sarro

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	English
Title of host publication	Proceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems
Editors	L Buchaillot, H Zappe
Place of Publication	Piscataway, NJ, USA
Publisher	IEEE
Pages	329-332
Number of pages	4
ISBN (Print)	978-146730324-8
DOIs	https://doi.org/10.1109/MEMSYS.2012.6170202
Publication status	Published - 2012
Event	MEMS 2012, Paris, France - Piscataway, NJ, USA Duration: 29 Jan 2012 → 2 Feb 2012

Publication series

Name
Publisher	IEEE

Conference

Conference	MEMS 2012, Paris, France
Period	29/01/12 → 2/02/12

Bibliographical note

harvest
Article number: 6170202

Access to Document

10.1109/MEMSYS.2012.6170202

Cite this

@inproceedings{5cf13872298f4358a20fb309f0a32a62,

title = "Stiction-driven sealing of surface micromachined channels",

author = "B Morana and G Pandraud and F Santagata and JF Creemer and PM Sarro",

note = "harvest Article number: 6170202; MEMS 2012, Paris, France ; Conference date: 29-01-2012 Through 02-02-2012",

year = "2012",

doi = "10.1109/MEMSYS.2012.6170202",

language = "English",

isbn = "978-146730324-8",

publisher = "IEEE",

pages = "329--332",

editor = "L Buchaillot and H Zappe",

booktitle = "Proceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems",

address = "United States",

}

Stiction-driven sealing of surface micromachined channels. / Morana, B; Pandraud, G; Santagata, F et al.
Proceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems. ed. / L Buchaillot; H Zappe. Piscataway, NJ, USA: IEEE, 2012. p. 329-332.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - Stiction-driven sealing of surface micromachined channels

AU - Morana, B

AU - Pandraud, G

AU - Santagata, F

AU - Creemer, JF

AU - Sarro, PM

N1 - harvest Article number: 6170202

PY - 2012

Y1 - 2012

U2 - 10.1109/MEMSYS.2012.6170202

DO - 10.1109/MEMSYS.2012.6170202

M3 - Conference contribution

SN - 978-146730324-8

SP - 329

EP - 332

BT - Proceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems

A2 - Buchaillot, L

A2 - Zappe, H

PB - IEEE

CY - Piscataway, NJ, USA

T2 - MEMS 2012, Paris, France

Y2 - 29 January 2012 through 2 February 2012

ER -