Stiction-driven sealing of surface micromachined channels

B Morana, G Pandraud, F Santagata, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Title of host publicationProceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems
EditorsL Buchaillot, H Zappe
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages329-332
Number of pages4
ISBN (Print)978-146730324-8
DOIs
Publication statusPublished - 2012
EventMEMS 2012, Paris, France - Piscataway, NJ, USA
Duration: 29 Jan 20122 Feb 2012

Publication series

Name
PublisherIEEE

Conference

ConferenceMEMS 2012, Paris, France
Period29/01/122/02/12

Cite this

Morana, B., Pandraud, G., Santagata, F., Creemer, JF., & Sarro, PM. (2012). Stiction-driven sealing of surface micromachined channels. In L. Buchaillot, & H. Zappe (Eds.), Proceedings 2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (pp. 329-332). IEEE Society. https://doi.org/10.1109/MEMSYS.2012.6170202