Stiction-induced sealing of surface micromachined channels

B Morana, RH Poelma, G Fiorentino, J Wei, JF Creemer, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

1 Citation (Scopus)
Original languageEnglish
Pages (from-to)459-470
Number of pages12
JournalIEEE Journal of Microelectromechanical Systems
Volume23
Issue number2
DOIs
Publication statusPublished - 2014

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