@article{cd7f0b298820439c9bb18ee1c605e644,
title = "Stiction-induced sealing of surface micromachined channels",
author = "B Morana and RH Poelma and G Fiorentino and J Wei and JF Creemer and PM Sarro",
note = "Published online 23-9-2013",
year = "2014",
doi = "10.1109/JMEMS.2013.2280535",
language = "English",
volume = "23",
pages = "459--470",
journal = "IEEE Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "2",
}